关键词: 仪器仪表技术, 压电泵, 主动控制, 阀, 电磁线圈

Abstract: A new type of piezoelectric pump with active electromagnetic driven valve was developed. Compared with the piezoelectric pump with the passive valve which is opened by the flowing fluid, the valve of this pump is opened by the electromagnetic force, so can save the energy consumption of fluid inside the piezoelectric pump chamber when the valve works. Moreover, according to the requirements of working condition, the value timing can be controlled by adjusting the duty cycle and phase of the control signal of the valve. This makes the pump not only be able to pump the liquid forward and backward actively, but also to control the flow rate accurately, which provides a new approach of improvement of the piezoelectric pump performance. The experimental results show that the maximum flow rate of the pump was 160 mL/min at frequency 30 Hz.

Key words: technology of instrument and meter, piezoelectric pump, active control, valve, electromagnetic coil