关键词: ITO薄膜, Ag掺杂, 退火, 晶格常数, 透射率

Abstract:

ITO and Ag-ITO thin films with a  thickness  of 130 nm were respectively deposited on glass substrates at room temperature, and post annealed in atmosphere for 1 h. The microstructure and transmittance spectra of all the samples were measured by X\|ray diffraction (XRD) and ultraviolet\|visible spectrophotometry, respectively. The lattice constants in the normal direction of the crystal faces (211) and (222) of all the films were calculated. The lattice constants were decreased with the increase of annealing temperature and the  lattice was further distortion   found after Ag doping in ITO matrix. The ITO and Ag-ITO films have almost the same transmittance in the visible range at high annealing temperatures. But the transmittances of the two kinds of films were quite different at lower annealing temperatures. The influences of annealing and Ag doping on lattice constant, crystallinity and transmittance of ITO films were also discussed.

Key words: ITO films; , Ag doping, annealing, lattice constant, transmittance