Abstract: N-implantation into amorphous carbon films with different doses was carried out to study the formation of CN bonding. Raman and XPS sp ectra were used to characterize the chemical bonding of CN bonds in amorphous carbon films after N-implantation. The results show that N atoms implanted into amorphous carbon films are bound to C atoms by different bonding types of sp³ C-N, sp² C-N and C≡N in the films. When N-implantation dose increases, the relative content of sp³ C-N bonds increases, which is more than those of other types of C-N bonds in the films. It indicates that N-implantation is favorable to the formation of sp³ C-N bonds.

Key words: N-implantation, amorphous carbon film, magnetron spu