Abstract: We analyzed the measurement method of Si-based organic single-films using a model WVASE32 ellipsometer and measured the films of polymethyl methacrylate（PMMA） and fluoro-polyester material. According to the results, we designed the arrayed waveguide grating （AWG） devices. Refractive index can be exactly measured between 124 nm and 1 700 nm, and mean square error(MSE) is far less than 1. Such result suggested that the measurement is very precise. At the same time we discussed the measurements of multilayer organic films and polymer fluoride films.

Key words: arrayed waveguide grating, polymer, optical coefficient, ellipsometer