Abstract:

Using magnetron sputtering technique, VC thin films were prepared by changing the substrate bias at room temperature. We investigated the effect of substrate bias on the crystal structure, hardness and friction properties of VC thin films, and established the intrinsic relationship between them. The
 results show that with the increase of substrate bias, the grain is refined,  the hardness and wear resistance of films are increased, and the change of the friction coefficient is slight.

Key words: substrate bias, thin film, mechanical property