关键词: Fe₅₄Pt₄₆薄膜, 磁控溅射, 结构, 磁性

Abstract:

The Fe₅₄Pt₄₆ thin film was deposited on SiO₂〈0001〉 substrate by magnetron sputtering system, then the as\|deposited film was vacuum annealed at 650 ℃ in situ. The structure and magnetic properties of the film were investigated by means of X\|ray diffraction and vibrating sample magnetometer. The results indicate that phase transformation from disordered to ordered phase happened after vacuum annealing in situ. The face\|centered tetragonal L1₀-FePt thin film was obtained. Degree of chemical ordering is 0.92 and grain size is about 10 nm. The in\|plane coercivity of the film has reached 0.8 MA/m. The maximum value of coercivity was gained when the angle between magnetic filed and film surface is 50° corresponding to (111) minimum energy surface.

Key words: Fe₅₄Pt₄₆ thin film, magnetron sputtering, structure, magnetic property