关键词: α-Fe₂O₃, 纳米结构, 电喷雾, 气敏, 薄膜

Abstract: α-Fe₂O₃ films with meshy nanostructures were deposited via a selfbuilt electrospray equipment on FTO substrates. Mixed solution of Fe(NO₃)₃ and HAuCl₄ was used as precursor with the concentration of 10^-6 mol/L. Composition, structure, morphology and acetone sensitivity were characterized by Xray diffraction （XRD）, Raman spectrum, scanning electron microscope （SEM）, energy dispersive Xray fluoresence spectrometer （EDX）, Xray photoelectron spectroscopy （XPS） and gas sensitive test. The results show that the films are composed of the accumulated α-Fe₂O₃ nanoparticles. The concentration of the chloroauric acid and deposition time have a regulatory effect on the morphology of the mesh structure in the spray process. Therefore, electrospray method has the advantages of less raw material consumption and high dispersion of product.

Key words: α-Fe₂O₃, nanostructure, electrospray, gas sesitive, film