X射线对双层封装材料剂量增强效应的影响

Abstract

Abstract: DEFs (Dose Enhancement Factor) in Silicon produced by X-rays with different energies were calculated via Monte Carlo method for the structures (such as Al/Au-Si, Kovar/Au-Si, Au/Al-Si and Au/Kovar-Si)  of double package materials. The sensitive section of dose enhancement in Silicon of semiconductor device was determined. DEFs at the different sensitive sections in Silicon and the energy ranges of X-ray for dose enhancement were also demonstrated. 

Key words: Monte Carlo method, X-ray, package material, dose enhancement factor

CLC Number:

O434.1

ZHOU Yin hang, MA Yu gang, LIU Shao lin, SUN Liang, ZHAO Guang yi, MA Chun hui. Effect on Dose Enhancement of Double Deck Package Materials Produced by X-ray[J].J4, 2006, 44(04): 637-640.

[1]	GUO Junda, HU Changcheng, YU Yue, SUN Chao, YAO Ye. Anti-corrosion Improvement of Neutralization Gun Component in X-Ray Photoelectron Spectroscopy [J]. Journal of Jilin University Science Edition, 2025, 63(6): 1760-1766.
[2]	JIANG Sheng, YE Xin, LIU Yanxiu, LI Kaitai, ZHAO Peng, LI Ye. Soil Background Estimation Algorithm Based on Improved RBF Neural Network Model [J]. Journal of Jilin University Science Edition, 2023, 61(3): 577-582.
[3]	YUAN Yi, LI Guoxiang, WANG Jijun. Adaptive Enhancement Algorithm of Digital X-Ray Image Based on Markov Random Field Model [J]. Journal of Jilin University Science Edition, 2023, 61(2): 377-383.
[4]	DU Yujing. Estimation of Parameters of Dynamic Reliability Model with Covariates [J]. Journal of Jilin University Science Edition, 2018, 56(2): 311-315.
[5]	CHEN Chun-Sheng, TUN Guo-Guang, GAO Fu-Bin, MA Yan, DU Guo-Tong, LI Mo-Cheng. InN Films Grown on 6H\\|SiC by Radio Frequency Plasma-Assisted Molecular Beam Epitaxy [J]. J4, 2012, 50(06): 1247-1251.
[6]	WANG Zhao hong, LI Yong hua, MENG Fan ling, ZHAO Zhu di. X-Ray Diffraction Patterns of Quenched and Annealed Nylon 6 Crystals [J]. J4, 2012, 50(01): 126-128.
[7]	CUI Ji-Wen, WANG Shu-Gong, ZHANG Rui-Ren, NA Hui, MENG Lian-Jie. Preparation and Curing Reaction Kinetics of Epoxy Resin Containing Biphenyl Structure/Montmorillonite Nanocomposites [J]. J4, 2011, 49(05): 939-943.
[8]	GUO Xing-Yuan, DING Zhan-Hui, XUE Yan-Feng, XU Ji-Lian, YI Yan-Lei, LI Liang, ZHOU Jing, HU Da-Feng-. Raman Spectra of ZnO Whisker at Various Temperatures [J]. J4, 2010, 48(05): 840-842.
[9]	ZHANG Jian-Fang, DIAO An-Xi, WANG Yu-De, WANG Meng-Yong, MA Yu-Gang, ZHANG Hui-. MCNP Simulation of High-Purity Germanium Detector Efficiency [J]. J4, 2010, 48(05): 843-846.
[10]	MENG Fan ling, LI Yong hua, LIU Chang sheng, XU Yue, WANG Yu ming. SAXS Investigation the Precipitation of δ′ Phase in 1420 Alloy Treated by Aging-retrogression-reaging [J]. J4, 2008, 46(05): 971-973.
[11]	MENG Fan ling, LI Yong hua, LIU Chang sheng, XU Yue, WANG Yu ming. The Behavior of Crystalline Grain Growth in TiNi Shape Memory Alloy Thin Films [J]. J4, 2008, 46(03): 531-534.
[12]	DONG Wen bin, ZHAO Guang yi, ZHAO Bao kui, ZHOU Yin hang, MA Yu gang. Monte\\|Carlo Calculation of X\\|ray Dose\\|enhancement\\|factor Nearby Copper-phthalocyanine Connected Two High Z Metal Interface [J]. J4, 2008, 46(03): 524-527.
[13]	ZHAO Bao kui, ZHAO Guang yi, ZHOU Yin hang, MA Yu gang, DONG Wen bin. Monte-Carlo Calculation of X-Ray Dose-enhancement-factor Nearby Copper-phthalocyanine Connected High ZMetal Interface [J]. J4, 2007, 45(03): 448-450.
[14]	GUO Xing-yuan, ZHANG Hong-wu, MA Guang, DING Zhan-hui, WANG Jian. Preparation and Raman Spectra of Rutile Single Crystal [J]. J4, 2007, 45(02): 268-270.
[15]	LIU Fangfang,, LIU Bo. Parallel Monte Carlo Domain Decomposition Algorithm for Solving Parabolic Functions [J]. J4, 2007, 45(02): 173-178.

Effect on Dose Enhancement of Double Deck Package Materials Produced by X-ray

PDF (PC)

Like

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Metrics

Comments

Recommended 10