Abstract:

A kind of microtype precision loading device for insitu nanoindentation test was proposed. Assisting with the main requirement to nanoindentation test, the mechanism of precision loading device was designed and analyzed, and the scheme to realize nanoindentation test of diamond indenter under the help of hybrid process of piezoelectric stack and flexure hinges was established. The force signal of nanoindentation was measured via flexure hinge based on Hooke's law. The mechanical analysis and modal study of indentation flexure hinges unit were carried out. Based on those works, the indentation performance, loading force measurement and so on of developed testing platform were tested. The indentation test of single crystal silicon wafer was carried out with the developed prototype. The effective stroke of diamond indenter was 11.96 μm with actuating voltage of 100 V. The platform meets the basic functional requirements of indentation test.

Key words: insitu nanoindentation, precision loading device, force signal, displacement signal , diamond indenter