激光晶化多晶硅的制备与XRD谱

激光晶化多晶硅的制备与XRD谱

廖燕平^1,2, 黄金英¹, 郜峰利¹,4, 邵喜斌^1,3, 付国柱¹, 荆海^1,3，缪国庆²

1. 中国科学院长春光学精密机械与物理研究所, 北方液晶工程研究开发中心, 长春 130021;2. 中国科学院激发态物理重点实验室, 长春 130021; 3. 吉林北方彩晶数码电子有限公司,长春 130031;4. 吉林大学电子科学与工程学院, 长春 130023

收稿日期:2003-07-20 修回日期:1900-01-01 出版日期:2004-01-26 发布日期:2004-01-26
通讯作者: 廖燕平

Poly-silicons preparation by excimer laser annealing and characterization by XRD

LIAO Yan-ping^1,2, HUANG Jin-ying¹, GAO Feng-li¹,4, SHAO Xi-bin^1,3, FU Guo-zhu¹, JING Hai^1,3, MIAO Guo-qing³

1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science; North Liquid Crystal Engineering Research and Development Center, Changchun 130021, China;2. The Key Laboratory of Excited State Processes, Chinese Academy of Science, Changchun 130021, China;3. Jilin North Cai Jing Digital Electron Limited Corporation, Changchun 130031, China；4. Institute of Electrical Science and Engineering, Jilin University, Changchun130023, China

Received:2003-07-20 Revised:1900-01-01 Online:2004-01-26 Published:2004-01-26
Contact: LIAO Yan-ping

摘要/Abstract

摘要： 对氢化非晶硅（a-Si∶H）进行了脱氢和不同能量密度的准分子激光晶化多晶硅的实验, 对所得样品用X射线衍射表征. 针对多晶硅（111）面特征峰的强度、晶面间距和宽化信息, 分析了激光功率密度对晶化多晶硅结晶度和应力的影响, 根据谢乐公式（Scherrer）估算了晶粒的大小, 得到用准分子激光晶化多晶硅的较佳工艺参数, 并且验证了激光辐射对薄膜材料作用的3种情况.

关键词: 氢化非晶硅, 脱氢, 激光晶化, 多晶硅, X射线衍射, 半宽度

Abstract: Based on the dehydrogenation of a-Si∶H and the excimer laser annealing crystallization of a-Si thin films at various laser energy density, poly-silicon samples were obtained and characterized with XRD. According to the p-Si (111) plane characteristic peak intensity, widening information and interplanar distance, the influence of laser power density on the crystallization degree and stress was analyzed in detail. The grain size was estimated according to the Scherrer formula, the better process parameters of laser annealing crystallization p-Si were obtained and the three stages of laser radiation to the thin film material were attested.

Key words: hydrogenated amorphous silicon, dehydrogenation, ex cimer laser annealing crystallization, poly-silicon, X-ray diffraction, full width at half maximum

中图分类号:

O484.4

廖燕平, 黄金英, 郜峰利,4, 邵喜斌, 付国柱, 荆海，缪国庆. 激光晶化多晶硅的制备与XRD谱[J]. J4, 2004, 42(01): 99-102.

LIAO Yan-ping, HUANG Jin-ying, GAO Feng-li,4, SHAO Xi-bin, FU Guo-zhu, JING Hai, MIAO Guo-qing. Poly-silicons preparation by excimer laser annealing and characterization by XRD[J]. J4, 2004, 42(01): 99-102.

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