关键词: FePt薄膜, 厚度, 织构, 磁性

Abstract:

FePt thin films of different thicknesses were prepared by magnetron sputtering on thermally oxidized Si substrates and annealed at 600 ℃ for 1 h in hydr
ogen to obtain L1₀-FePt films. The results of Xray diffraction show that L1₀-FePt films have a (001) texture or obvious growth in (001) orientation. The grain size of FePt and the degree of ordering increase, and (001) orientation decreases with the increased deposition thickness. Magnetic data exhibit
the inplane coercivity increases, while the outofplane coercivity first increases and then decreases with the increased film thickness. When the film thickness is 10 nm, the sample has the most perpendicular magnetic anisotropy.

Key words: FePt film, thickness, texture, magnetic property