X射线对双层封装材料剂量增强效应的影响

Effect on Dose Enhancement of Double Deck Package Materials Produced by X-ray

ZHOU Yin hang¹, MA Yu gang¹, LIU Shao lin², SUN Liang¹, ZHAO Guang yi¹, MA Chun hui¹

1. College of Physics, Jilin University, Changchun 130021, China; 2. College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

Received:2005-09-08 Revised:1900-01-01 Online:2006-07-26 Published:2006-07-26
Contact: MA Yu gang

Abstract

Abstract: DEFs (Dose Enhancement Factor) in Silicon produced by X-rays with different energies were calculated via Monte Carlo method for the structures (such as Al/Au-Si, Kovar/Au-Si, Au/Al-Si and Au/Kovar-Si)  of double package materials. The sensitive section of dose enhancement in Silicon of semiconductor device was determined. DEFs at the different sensitive sections in Silicon and the energy ranges of X-ray for dose enhancement were also demonstrated. 

Key words: Monte Carlo method, X-ray, package material, dose enhancement factor

CLC Number:

O434.1

ZHOU Yin hang, MA Yu gang, LIU Shao lin, SUN Liang, ZHAO Guang yi, MA Chun hui. Effect on Dose Enhancement of Double Deck Package Materials Produced by X-ray[J].J4, 2006, 44(04): 637-640.

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Effect on Dose Enhancement of Double Deck Package Materials Produced by X-ray

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