Abstract: By means of the combination of Monte Carlo model of fast electron and ions (N^＋_２，N^＋) in a plasma, the axial distribution of the creation rate of the atomic ions for bo th N^＋_２-N_２ and e^－-N _２ dissociations under different discharge conditions in nitrogen glow discharge and the distribution of the energy for bombarding the cathode were investigated. It was found that the creation rate of the atomic ions increased wit h inc reasing the voltage or the gas pressure, but decreased with increasing gas temp e rature. Ions N^＋_２ are mainly produced by N^＋_２-N_２ dissociation in front of the cathode at a higher voltage.

Key words: nitrogen direct current glow discharge, Monte Carl o simulat ion, nitrogen atomic ion, dissociation collision