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Chinese
Squeeze Film Damping Effect on Dynamic Response of MOEMS Optical Switch with Slant Lower Electrode
SUN Dong-ming, DONG Wei, GUO Wen-bin, LIU Cai-xia,WANG Guo-dong, XU Bao-kun, CHEN Wei-you
Journal of Jilin University Science Edition . 2005, (
03
): 343 -347 .