吉林大学学报(信息科学版) ›› 2025, Vol. 43 ›› Issue (2): 213-219.

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基于微球超透镜的自混合干涉仪

周业坤, 高丙坤   

  1. 东北石油大学 电气信息工程学院, 黑龙江 大庆 163318
  • 收稿日期:2025-03-08 出版日期:2025-04-08 发布日期:2025-04-09
  • 通讯作者: 高丙坤(1962— ), 男, 河北故城人, 东北石油大学教授, 博士生导师, 主要从事超精密测量研究, (Tel)86-15045908000(E-mail)gaobk@ 163. com。 E-mail:gaobk@ 163. com。
  • 作者简介:周业坤(1996— ), 男, 河南商丘人, 东北石油大学硕士研究生, 主要从事自混合干涉研究, ( Tel) 86-18236396074(E-mail)zyk9160@ 163. com
  • 基金资助:
    国家自然科学基金资助项目(61422301)

Self-Mixing Interferometer Based on Microsphere Superlens

ZHOU Yekun, GAO Bingkun   

  1. School of Electrical and Information Engineering, Northeast Petroleum University, Daqing 163318, China
  • Received:2025-03-08 Online:2025-04-08 Published:2025-04-09

摘要:

针对微振动检测设备结构复杂与检测误差大的问题, 提出了一种基于微球超透镜和边缘滤波器的自混干涉仪。利用UV(Ultraviolet Curing Adhesive) 胶在光纤探头尖端形成微球, 当微球受到光纤的光照射时, 会出现光子纳米射流现象。光子纳米射流聚焦在目标物体表面增强目标物体到微球表面的反射光。光子纳射流产生的倏逝场对近场表面的纳米振动检测具有重要的增强和锐化作用。 在传感器末端利用马赫鄄曾德 边缘滤波器将幅度调制信号转换为频率调制信号, 进一步增加其信噪比。实验结果表明, 该方法的重构误差27nm, 对光学器件的小型化具有重要意义。

关键词: 振动检测, 光子纳米射流, 马赫增德尔边缘滤波器, 自混合干涉

Abstract:

A self-mixing interferometer based on microsphere superlens and edge filter is proposed to solve the problems of complex structure and large error of microvibration detection equipment. UV( Ultraviolet Curing Adhesive) glue is used to form a microsphere at the tip of the optical fiber probe. When the microsphere is irradiated by the optical fiber, PNJ(Photon Nanojet) phenomenon will appear. PNJ focuses on the surface of the target object to enhance the reflected light of the target object to the surface of the microsphere. The evanescent field generated by the photon nanojet plays an important role in enhancing and sharpening the nanovibration detection on the near-field surface. The amplitude modulated signal is converted into frequency modulated signal by Mach-Zender edge filter at the end of the sensor, and the signal-to-noise ratio is increased. Experimental results show that the reconstruction error of this method is 27 nm, which is of great significance for the miniaturization of optical devices.

Key words: vibration detection, photon nanojet, mahzindel edge filter, self-mixing interference

中图分类号: 

  • TN929. 11