Abstract:  In order to solve the problem of the low sensitivity of the traditional waveguide sensor based on
organic substrate, the MZI ( Mach-Zehnder Interferometer) waveguide sensing structure of high sensitivity
based on polymer materials is proposed, and two high sensitivity waveguide sensing structure with symmetric
MZI and asymmetric MZI is designed. The sensitivity of the optimized symmetric MZI waveguide sensor in the
interval 1. 34 ~ 1. 36, 1. 36 ~ 1. 38, 1. 38 ~ 1. 40 are 1 850. 76 dB/ RIU, 1 995. 09 dB/ RIU,
1 547. 30 dB/ RIU. The sensitivity of the optimizedasymmetric MZI waveguide sensor in the interval 1. 33 ~
1. 35,1. 35 ~1. 38,1. 38 ~1. 40 are 1 719. 23 dB/ RIU, 1 251. 68 dB/ RIU, 2 065. 22 dB/ RIU. For the two
sensing structure, the high sensing accuracy in 1. 33 ~ 1. 40 can be realized by the design of integrated
waveguide sensors.

Key words: high accuracy, sensor, polymer, optical waveguide