抛光盘表面修整热误差的流体压力补偿方法

doi:10.13229/j.cnki.jdxbgxb.20250780

摘要/Abstract

摘要：

针对大口径平面光学元件连续抛光加工过程中Φ1 200 mm口径金属抛光盘表面修整的热变形问题，提出了一种利用流体压力实现金属抛光盘表面修整热误差的补偿方法。设计Φ1 200 mm口径金属抛光盘表面的流体压力调控系统结构，针对抛光盘表面热变形、抛光盘表面流体压力调控规律以及流体压力调控的抛光盘表面热误差补偿开展实验研究。试验结果表明，通过调节流体压力可以实现抛光盘表面热位移误差补偿，当进液口压力为0.10 MPa时，Φ1 200 mm直径抛光盘表面热误差补偿效果最好，峰谷值从原始的24 μm降低到14 μm，热误差降低了42%。

关键词: 超精密加工, 热误差补偿, 平面光学元件, 流体压力调控, 平面抛光

Abstract:

To solve the problem of thermal deformation in the surface dressing of Φ1 200 mm metal polishing disc during the continuous polishing process of large aperture planar optical elements， a compensation method of thermal error in the surface dressing of metal polishing pad using fluid pressure is proposed. The structure of fluid pressure control system on the surface of Φ1 200 mm metal polishing pad was designed. Three aspects of the experiment were studied， including the thermal deformation of the polishing pad surface， the fluid pressure control deformation of the polishing pad surface， and the thermal error compensation of the polishing pad surface. The experimental results showed that the surface thermal error compensation of polishing pad can be realized by adjusting the fluid pressure. When liquid inlet pressure was 0.10 MPa， the best effect of surface thermal error compensation of Φ1 200 mm polishing pad was obtained， in which the error peak and valley value was reduced from the original 24 μm to 14 μm， and the thermal error was reduced by 42%.

Key words: ultra precision machining, thermal error compensation, planar optical components, fluid pressure regulation, flat polishing

中图分类号:

TH122

赵凌宇,高泽村,赵惠英. 抛光盘表面修整热误差的流体压力补偿方法[J]. 吉林大学学报(工学版), 2026, 56(10): 2546-2553.

Ling-yu ZHAO,Ze-cun GAO,Hui-ying ZHAO. Fluid pressure compensation method for thermal error in polishing pad surface dressing[J]. Journal of Jilin University(Engineering and Technology Edition), 2026, 56(10): 2546-2553.

图/表 15

图1

图2

图3

表1

表2

不同作用时间的抛光盘表面流体压力变形试验参数"

序号

t/min

$p 1$ /MPa

（主动控制）

$p 2$ /MPa

（实时监测）

抛光盘表面变形/μm

0.1

0.02

根据式（7）测量并计算

0.1

0.02

0.1

0.02

表2

图4

图5

表3

抛光盘表面轮廓热误差补偿的试验参数"

序号	t/min	$p 1$ /MPa （主动控制）	$p 2$ /MPa （实时监测）	n/ （r·min^-1）	抛光盘表面热热位移/μm
1	10	0.10	0.02	100	根据式（6）测量并计算
2	10	0.15	0.03	100
3	10	0.20	0.05	100
4	10	0.25	0.06	100
5	10	0.30	0.08	100

表3

图6

图7

图8

图9

图10

图11

图12

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