Journal of Jilin University(Engineering and Technology Edition) ›› 2026, Vol. 56 ›› Issue (10): 2546-2553.doi: 10.13229/j.cnki.jdxbgxb.20250780

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Fluid pressure compensation method for thermal error in polishing pad surface dressing

Ling-yu ZHAO1(),Ze-cun GAO1,Hui-ying ZHAO2   

  1. 1.School of Mechanical Engineering，Beijing Institute of Petrochemical Technology，Beijing 102627，China
    2.School of Mechanical Engineering，Xi'an Jiaotong University，Xi'an 710049，China
  • Received:2025-09-01 Online:2026-10-01 Published:2026-10-09

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Abstract:

To solve the problem of thermal deformation in the surface dressing of Φ1 200 mm metal polishing disc during the continuous polishing process of large aperture planar optical elements， a compensation method of thermal error in the surface dressing of metal polishing pad using fluid pressure is proposed. The structure of fluid pressure control system on the surface of Φ1 200 mm metal polishing pad was designed. Three aspects of the experiment were studied， including the thermal deformation of the polishing pad surface， the fluid pressure control deformation of the polishing pad surface， and the thermal error compensation of the polishing pad surface. The experimental results showed that the surface thermal error compensation of polishing pad can be realized by adjusting the fluid pressure. When liquid inlet pressure was 0.10 MPa， the best effect of surface thermal error compensation of Φ1 200 mm polishing pad was obtained， in which the error peak and valley value was reduced from the original 24 μm to 14 μm， and the thermal error was reduced by 42%.

Key words: ultra precision machining, thermal error compensation, planar optical components, fluid pressure regulation, flat polishing

CLC Number: 

  • TH122

Fig.1

Principle model of fluid pressure regulation for surface of polishing pad"

Fig.2

Fluid pressure deformation model of polishing pad surface"

Fig.3

Physical object of fluid pressure control system on surface of polishing pad"

Table 1

Original thermal displacement experiment on surface of polishing pad"

序号转台转速n/（r·min-1）抛光盘表面热位移/μm
120

根据式（6）

测量并计算

260
3100

Table 2

Experimental parameters for stress deformation on surface of polishing pad"

序号t/min

p1/MPa

（主动控制）

p2/MPa

（实时监测）

抛光盘表面变形/μm
100.10.02根据式（7）测量并计算
2100.10.02
3200.10.02

Fig.4

Experimental scheme for fluid pressure regulation of polishing pad surface"

Fig.5

Experimental platform of fluid pressure control on surface of polishing pad"

Table 3

Experimental parameters for thermal error compensation of polishing pad surface"

序

号

t/min

p1/MPa

（主动控制）

p2/MPa

（实时监测）

n/

（r·min-1）

抛光盘表面热热位移/μm
1100.100.02100

根据式（6）

测量并计算

2100.150.03100
3100.200.05100
4100.250.06100
5100.300.08100

Fig.6

Calculation results of turntable thermal power"

Fig.7

Thermal error on the surface of polishing pad at different rotational speeds of turntable"

Fig.8

Deformation of polishing pad surface under different fluid pressure application durations"

Fig.9

Surface deformation of polishing pad under different fluid pressure"

Fig.10

Maximum and average values of surface deformation of the polishing pad"

Fig.11

Compensation result of thermal displacement error on surface of polishing pad"

Fig.12

Compensation result of thermal displacement error on surface of polishing pad"

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