直流辉光放电氮原子离子的Monte Carlo模拟研究

直流辉光放电氮原子离子的Monte Carlo模拟研究

张连珠, 何琪

河北师范大学物理系，石家庄 050016

收稿日期:2002-05-29 修回日期:1900-01-01 出版日期:2003-01-26 发布日期:2003-01-26
通讯作者: 张连珠

Monte Carlo Simulation of Nitrogen Atomic Ions in Direct-current Glow Discharge

ZHANG Lian-zhu, HE Qi

Department of Physics, Hebei Normal University, Shijiazhuang 050016 , China

Received:2002-05-29 Revised:1900-01-01 Online:2003-01-26 Published:2003-01-26
Contact: ZHANG Lian-zhu

摘要/Abstract

摘要： 采用氮直流辉光放电等离子体中快电子和离子（N^＋_２，N^＋）混合的蒙特卡罗模型，模拟研究了 e^－+ N_２___N^＋+N+2e和N^＋_２+N_２___N^＋+N+N_２过程离子N^＋的产生率轴向分布随放电参数的变化规律及其轰击阴极的能量分布 . 结果表明，两种离解过程中氮原子离子（N^＋）的产生率均随气压和电压的增加而增大，随放电气体温度的升高而降低；但N^＋_２-N_２离解碰撞主要发生在阴极附近. 在电压较高时，阴极处的N^＋主要由N^＋ _２-N_２离解过程产生；在电压较低时， N^＋_２-N_２离解过程可忽略.

关键词: 氮直流辉光放电, 蒙特卡罗模拟方法, 氮原子离子, 离解碰撞

Abstract: By means of the combination of Monte Carlo model of fast electron and ions (N^＋_２，N^＋) in a plasma, the axial distribution of the creation rate of the atomic ions for bo th N^＋_２-N_２ and e^－-N_２ dissociations under different discharge conditions in nitrogen glow discharge and the distribution of the energy for bombarding the cathode were investigated. It was found that the creation rate of the atomic ions increased wit h inc reasing the voltage or the gas pressure, but decreased with increasing gas temp e rature. Ions N^＋_２ are mainly produced by N^＋_２-N_２ dissociation in front of the cathode at a higher voltage.

Key words: nitrogen direct current glow discharge, Monte Carl o simulat ion, nitrogen atomic ion, dissociation collision

中图分类号:

O461.2

张连珠, 何琪. 直流辉光放电氮原子离子的Monte Carlo模拟研究[J]. J4, 2003, 41(01): 77-80.

ZHANG Lian-zhu, HE Qi. Monte Carlo Simulation of Nitrogen Atomic Ions in Direct-current Glow Discharge[J]. J4, 2003, 41(01): 77-80.