高功率准分子激光沉积类金刚石膜的热稳定性

高功率准分子激光沉积类金刚石膜的热稳定性

金哲¹, 李俊杰¹, 盖同祥¹, 林景波¹, 李哲奎¹, 张寿¹, 彭鸿雁², 金曾孙²

1. 延边大学理工学院, 延吉 133002; 2. 吉林大学超硬材料国家重点实验室, 长春 130012

收稿日期:2003-02-25 修回日期:1900-01-01 出版日期:2003-10-26 发布日期:2003-10-26
通讯作者: 李俊杰

Thermal Stability of Diamond-like Films Deposited by High Power Excime Laser

JIN Zhe¹, LI Jun-jie¹, GAI Tong-xiang¹, LIN Jin g-bo¹, LI Zhe-kui¹, ZHANG Shou¹, PENG Hong-yan< sup>2, JIN Zeng-sun²

1. School of Science and Engineering, Yanbian University, Yanji 133002, China; 2. National Key Laboratory of Superhard Materials, Jilin University, Changchun 130012, China

Received:2003-02-25 Revised:1900-01-01 Online:2003-10-26 Published:2003-10-26
Contact: LI Jun-jie

摘要/Abstract

摘要： 在不同温度下(200~ 800 ℃) 将高功率准分子激光溅射方法沉积的类金刚石膜进行退火实验. 利用Raman和XPS光谱分析类金刚石膜在退火过程中的化学键合结构变化. 结果表明, 类金刚石膜是由少量的sp² C键和大量的sp³ C键组成的非晶态碳膜. 在退火温度小于600 ℃范围内, 类金刚石膜的热稳定性较好；退火温度高于600 ℃时, 类金刚石膜中的sp³ C键逐渐向sp² C键转变, 当退火温度升到800 ℃时, 类金刚石膜中sp³ C键含量由退火前的大约70%下降到40%. 可见, 高温退火能导致类金刚石膜的石墨化趋势.

关键词: 准分子激光沉积, 类金刚石膜, 热稳定性, 退火温度

Abstract: The diamond-like films deposited by high power excime laser were annealed at different temperatures (200~800 ℃) to study their therm al stability. Raman and XPS spectra were used to characterize the change of the chemical bonding structure of the diamond-like films annealed at different temperatures. The results show that the diamond-like films are composed of fewer sp² C bonds and larger sp³ C bonds fractions. When annea ling temperature was varied in the range of 200~600 ℃, the films have a good thermal stability. But when annealing temperature was increased continually from 6 00 ℃ to 800 ℃, the transformation from sp³ C to sp² C occurred in the films. Thus, higher temperature annealing can lead to the formation of larger fractions of sp² C in the films, the content of sp³ C drops from about 70% to 40% as annealing temperature is increased from 200 ℃ to 800 ℃.

Key words: excime laser deposition, diamond-like film, thermal stability, anneali ng temperature

中图分类号:

O484.5

金哲, 李俊杰, 盖同祥, 林景波, 李哲奎, 张寿, 彭鸿雁, 金曾孙. 高功率准分子激光沉积类金刚石膜的热稳定性[J]. J4, 2003, 41(04): 497-500.

JIN Zhe, LI Jun-jie, GAI Tong-xiang, LIN Jin g-bo, LI Zhe-kui, ZHANG Shou, PENG Hong-yan, JIN Zeng-sun. Thermal Stability of Diamond-like Films Deposited by High Power Excime Laser[J]. J4, 2003, 41(04): 497-500.

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