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高质透明ZnO/金刚石异质结的制备

杨洁1, 田红志2, 王成新3   

  1. 1. 空军航空大学 基础部, 长春 130022; 2. 吉林大学学报(信息科学版)编辑部, 长春 130012; 3. 中山大学 物理科学与工程学院, 广州 510275
  • 收稿日期:2005-11-17 修回日期:1900-01-01 出版日期:2006-05-26 发布日期:2006-05-26
  • 通讯作者: 杨洁

Fabrication of High-quality Transparent ZnO/Diamond Heterojunction

YANG Jie1, TIAN Hong-zhi2, WANG Cheng-xin3   

  1. 1. Department of Foundation, Aviation University of Airforce, Changchun 130022, China; 2. Editorial Department of Journal of Jilin University (Information Science Edition), Changchun 130012, China; 3. School of Physics and Engineering, Zhongshan University, Guangzhou 510275, China
  • Received:2005-11-17 Revised:1900-01-01 Online:2006-05-26 Published:2006-05-26
  • Contact: YANG Jie

摘要: 介绍一种高质透明异质结的表征与制备方法. 该异质结首先在金刚石单晶表面制备出p型金刚石单晶薄膜, 然后在其上制备高取向ZnO薄膜, 构成n型区. 系统测试结果表明, 当p\|n结正向偏压达到2.5 V时, 电流密度为109 A/m2, 启动电压为0.72 V, 与期待值一致. 良好的整流特性以及在可见光范围内的透明特性在该元件中得以实现. 

关键词: ZnO, 金刚石, p\|n结, 组装

Abstract: The fabrication and characterization of high-quality transparent heterojunction between n-type ZnO film and p-type diamond single crystalline film on the substrate of diamond bulk single crystal are described. The results indicate that the current density of the fabricated p-n junction reaches 110 A/m2 when the forward bias voltage is 2.5 V, and the turn-on voltage value is about 0.75 V that are in agreement with the expected values. Moreover, the excellent rectification characteristic and transparentness in the visible light range were applied in the device.

Key words: ZnO, diamond, p-n junction, fabrication

中图分类号: 

  • O475