金刚石膜制备工艺对其应力-应变特性的影响

金刚石膜制备工艺对其应力-应变特性的影响

白亦真¹,², 吕宪义³, 韩雪梅³, 金曾孙³, 吕天山⁴, 白媛⁵

1. 大连理工大学三束材料改性国家重点实验室, 辽宁省大连 116023; 2. 大连理工大学物理系, 辽宁省 大连 116023; 3. 吉林大学超硬材料国家重点实验室, 长春 130012; 4. 长春工业大学工商管理学院, 长春 130012; 5. 辽宁工学院计算机科学与工程学院, 辽宁省锦州 121000

收稿日期:2005-11-24 修回日期:1900-01-01 出版日期:2006-09-26 发布日期:2006-09-26
通讯作者: 吕宪义

Influences of Deposition Technologies on Stress-strain Properties of Thick Diamond Films

BAI Yi zhen¹,², LV Xian yi³, HAN Xue mei³, JIN Zeng sun³, LV Tian shan⁴, BAI Yuan⁵

1.State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology,Dalian 116023,Liaoning Province,China; 2.Department of Physics,Dalian University of Technology,Dalian 116023,Liaoning Province,China;3.State Key Laboratory of Superhard Materials,Jilin University,Changchun 130012,China;4.School of Business Administration, Changchun University of Technology,Changchun 130012,China;

Received:2005-11-24 Revised:1900-01-01 Online:2006-09-26 Published:2006-09-26
Contact: LV Xian yi

摘要/Abstract

摘要： 研究了在直流热阴极辉光放电等离子体化学气相沉积制备金刚石厚膜的工艺过程中, 放电电流和甲烷浓度对金刚石膜应力-应变特性的影响规律. 

关键词: 化学气相沉积, 金刚石膜, 应力-应变

Abstract: This paper focuses on the influences of the discharge current and methane concentration on the stress-strain properties of Chemical Vapor Deposition (CVD) thick diamond films. This has laid good foundations for the promotions of the qualities, especially the mechanical properties of thick diamond films.

Key words: chemical vapor deposition, diamond films, stress-strain 

中图分类号:

O484.5

白亦真,, 吕宪义, 韩雪梅, 金曾孙, 吕天山, 白媛. 金刚石膜制备工艺对其应力-应变特性的影响[J]. J4, 2006, 44(05): 784-786.

BAI Yi zhen,, LV Xian yi, HAN Xue mei, JIN Zeng sun, LV Tian shan, BAI Yuan. Influences of Deposition Technologies on Stress-strain Properties of Thick Diamond Films[J]. J4, 2006, 44(05): 784-786.

[1]	赵利军, 韩柏, 李博, 胡小颖. 光学级透明金刚石膜的性[J]. J4, 2008, 46(01): 112-114.
[2]	金哲, 李俊杰, 盖同祥, 林景波, 李哲奎, 张寿, 彭鸿雁, 金曾孙. 高功率准分子激光沉积类金刚石膜的热稳定性[J]. J4, 2003, 41(04): 497-500.