静电激励微简支梁吸合电压的尺度效应分析

吉林大学学报(理学版)

静电激励微简支梁吸合电压的尺度效应分析

丁楠^1,2, 徐旭¹, 郑卓群¹, 刘晓波³

1. 吉林大学数学学院, 长春 130012; 2. 吉林财经大学管理科学与信息工程学院，长春 130117；3. 吉林大学公共外语教育学院，长春 130012

收稿日期:2016-12-13 出版日期:2017-09-26 发布日期:2017-09-26
通讯作者: 徐旭 E-mail:xuxu@jlu.edu.cn

Analysis of Scale Effect of Pullin Voltage of Electrostatically Actuated Microbeam

DING Nan^1,2, XU Xu¹, ZHENG Zhuoqun¹， LIU Xiaobo³

1. College of Mathematics, Jilin University, Changchun 130012, China;2. School of Management Science and Information Engineering, Jilin University of Finance and Economics, Changchun 130117, China; 3. School of Foreign Language Education, Jilin University, Changchun 130012, China

Received:2016-12-13 Online:2017-09-26 Published:2017-09-26
Contact: XU Xu E-mail:xuxu@jlu.edu.cn

摘要/Abstract

摘要： 应用修正的偶应力理论及变分原理推导带有von-Karman非线性的微简支梁的运动方程及相应的边界条件, 并分析梁的宽度、高度、长度和极板间距对吸合电压的影响以及相应的尺度效应变化规律.

关键词: 修正偶应力理论, 吸合电压, 特征尺度参数, 微机电系统, 尺度效应

Abstract: We derived the equation of motion and corresponding boundary conditions for a simply supported microbeam with vonKarman nonlinearity by using the modified couple stress theory and the variational principle, and analyzed the influences of the width, height, length of the beam and the initial gap between the microbeam and the stationary electrode on the pullin voltage and the change rule of corresponding scale effects.

Key words: modified couple stress theory, characteristic scale parameter, pullin voltage, scale effect, microelectromechanical system (MEMS)

中图分类号:

O326

丁楠, 徐旭, 郑卓群, 刘晓波. 静电激励微简支梁吸合电压的尺度效应分析[J]. 吉林大学学报(理学版), 2017, 55(05): 1146-1150.

DING Nan, XU Xu, ZHENG Zhuoqun， LIU Xiaobo. Analysis of Scale Effect of Pullin Voltage of Electrostatically Actuated Microbeam[J]. Journal of Jilin University Science Edition, 2017, 55(05): 1146-1150.