衬底偏压对γ′-Fe4N薄膜磁性的影响

衬底偏压对γ′-Fe₄N薄膜磁性的影响

赵利军¹, 王丽丽¹, 宫杰¹, 郑伟涛²

1. 长春大学理学院, 长春 130022; 2. 吉林大学材料科学与工程学院, 长春 130012

收稿日期:2007-09-20 修回日期:1900-01-01 出版日期:2008-09-26 发布日期:2008-09-26
通讯作者: 郑伟涛

Effect of Substrate Bias Voltage on Magnetic Properties of γ′-Fe₄N Thin Films

ZHAO Li jun¹, WANG Li li¹, GONG Jie¹, ZHENG Wei tao²

1. College of Science, Changchun University, Changchun 130022, China; 2. College of Materials Science and Engineering, Jilin University, Changchun 130012, China

Received:2007-09-20 Revised:1900-01-01 Online:2008-09-26 Published:2008-09-26
Contact: ZHENG Wei tao

摘要/Abstract

摘要： 采用直流磁控溅射方法, 以Ar/N₂（N₂/(Ar+N₂)=10％）为放电气体, 在Si(100)单晶衬底上获得了γ′-Fe₄N薄膜样品. 利用X射线衍射(XRD)和振动样品磁强计(VSM)研究衬底偏压对γ′-Fe₄N薄膜样品的影响. 结果表明, 随着衬底负偏压的增大, γ′-Fe₄N薄膜样品的晶胞参数减小, Fe和N的化合效率与样品的致密度提高, 表面缺陷减少, 矫顽力降低. 

关键词: γ′-Fe₄N薄膜, 衬底偏压, 磁性

Abstract: γ′-Fe₄N thin films were deposited on single crystal Si (100) substrate by DC magnetron sputtering using an Ar/N₂ gas mixture (N₂/(Ar+N₂)=10％). The structure and magnetic properties of the films were characterized via Xray diffraction (XRD) and superconducting quantum interference device (SQUID). The effect of substrate bias voltage on magnetic properties of γ′-Fe₄N thin films were investigated. With the increase of substrate bias voltage, the efficiency of the reaction between Fe and N and the growth rate for γ′-Fe₄N were improved, the films obtained were smooth, and the values of M_s for all the FeN films were almost the same, but their coercivity was decreased.

Key words: γ′-Fe₄N thin film, substrate bias voltage, magnetic property

中图分类号:

O484.1

赵利军, 王丽丽, 宫杰, 郑伟涛. 衬底偏压对γ′-Fe₄N薄膜磁性的影响[J]. J4, 2008, 46(05): 963-966.

ZHAO Li jun, WANG Li li, GONG Jie, ZHENG Wei tao. Effect of Substrate Bias Voltage on Magnetic Properties of γ′-Fe₄N Thin Films[J]. J4, 2008, 46(05): 963-966.

[1]	徐强, 杨光敏, 秦宏宇, 白继鹏. 衬底偏压对VC纳米薄膜摩擦学性能的影响[J]. 吉林大学学报(理学版), 2016, 54(04): 883-886.
[2]	王丽丽, 安涛, 郑伟涛. γ′-（Fe_1-xNi_x)₄N薄膜结构及其磁学性能[J]. J4, 2012, 50(02): 337-340.
[3]	刘梅, 张玉梅, 于永生, 李海波, 费维栋. Fe₅₄Pt₄₆纳米薄膜的结构与磁性[J]. J4, 2009, 47(05): 1047-1049.
[4]	王丽丽,, 赵利军, 姜伟棣, 朱莉, 宫杰, 郑伟涛. γ′-Fe_{4^{N纳米晶薄膜的结构及低温磁性}}[J]. J4, 2009, 47(02): 341-344.
[5]	焦志伟, 刘洋, 王丽丽, 杨景海, 宗占国, 宫杰. 密堆六方结构Ni纳米颗粒的合成及其磁性[J]. J4, 2008, 46(04): 743-746.
[6]	王丽丽,, 支文, 赵利军, 王欣, 马楠, 金丹红, 郑伟涛. γ′-Fe₄N薄膜的制备及其磁性[J]. J4, 2007, 45(02): 275-278.
[7]	华中, 孙亚娟, 于万秋, 仲亚娟, 魏茂彬, 刘艳清. Fe⁷⁰Zr¹⁰B²⁰非晶合金的晶化及磁性能[J]. J4, 2007, 45(01): 94-97.

衬底偏压对γ′-Fe₄N薄膜磁性的影响

Effect of Substrate Bias Voltage on Magnetic Properties of γ′-Fe₄N Thin Films

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 7

Metrics

本文评价

推荐阅读 10