关键词: B-C-N薄膜, N₂流量, 傅里叶变换红外光谱, 射频磁控溅射

Abstract:

Boron-carbon-nitrogen (B-C-N) films were deposited by means of radio frequency (RF) magnetron sputtering from different targets,  which were hexagonal boron nitride, boron and graphite targets in the atmosphere of nitrogen and argon. The results of FTIR spectra indicate that there were two wide absorption bands at  1 200~1 800 cm^-1 and 1 000~1 750 cm^-1 separately,  and there existed characteristic absorption peak of  bond at 2 200 cm^-1. That is to say, C atom and N atom were combined in the deposited films. Graphite and h-BN targets were sputtered respectively, the results of FTIR spectra reveal that the absorption at  1 100 cm^-1 was not due to the stretching B—C bond, B-C-N films were deposited from h-BN  and C targets  inclined to phase separation,  and there was hybridization of atomic level in the deposited B-C-N films via B and C targets. 

Key words: B-C-N films, nitrogen flux, Fourier-transformed infrared spectrum, radio frequency magnetron sputtering