用RF磁控溅射法制备锂氮共掺p型氧化锌

J4 ›› 2010, Vol. 07 ›› Issue (4): 667-671.

用RF磁控溅射法制备锂氮共掺p型氧化锌

刘力^1,2, 郭秀芝^1,2, 赵婷婷^1,2

1. 北华大学物理学院, 吉林吉林132013|2. 吉林大学物理学院, 长春 130012

收稿日期:2009-10-26 出版日期:2010-07-26 发布日期:2011-06-14
通讯作者: 刘力 E-mail:liuli62@sina.com

p-Type Li-N Dual Doped ZnO Prepared by RF Magnetron Sputtering

LIU Li^1,2, GUO Xiu zhi^1,2, ZHAO Ting ting^1,2

1. College of Physics, Beihua University, Jilin 132013, Jilin Province, China;2. College of Physics, Jilin University, Changchun 130012, China

Received:2009-10-26 Online:2010-07-26 Published:2011-06-14
Contact: LIU Li E-mail:liuli62@sina.com

摘要/Abstract

摘要：

采用RF磁控溅射技术, 以掺杂氮化锂的氧化锌陶瓷为靶材, 用不同物质的量比的高纯氩气和氧气混合气体为溅射气体, 在石英衬底上生长锂氮共掺氧化锌薄膜, 并在600 ℃真空热退火30 min, 研究生长气氛对锂氮共掺氧化锌导电类型、晶体结构与低温光致发光的影响规律和机制. 结果表明, 当以n(氩气)∶n(氧气)=60的混合气体为溅射气体时, 可得到稳定的p型锂氮共掺氧化锌薄膜. X射线衍射谱表明, 样品具有高度的c轴择优取向. 由变温光致发光分析可知, 该薄膜的p型导电来源于Li_Zn受主缺陷, 其光学受主能级位于价带顶131.6 meV处.

关键词: RF磁控溅射, 锂氮共掺, 氧化锌, 半导体

Abstract:

The Li\|N dual doped ZnO (ZnO∶(Li,N)) thin films prepared on quartz substrates by means of RF magnetron sputtering with Li3N as dopant source and Ar/O₂ with diffetent molar ratio as sputtering gas. The as\|grown films were annealed in vacuum for 30 min at 600 ℃. The results show when n(Ar)∶n(O₂)=60, the stable p\|type ZnO∶(Li,N) thin film was obtained. XRD result shows that the film exhibits high preferential orientation in c\|axis direction. The p\|type conductivity results from the defect of substitutional Zn at O site (Li_Zn) via the analysis of temperature\|dependent PL, and the optical acceptor level of the Li_Zn was calculated to be 131.6 meV above the valence band maximum. The effects of the growth ambience on conductivity type, crystal structure and low temperature PL were studied.

Key words: RF magnetron sputtering, Li-N dual doped, zinc oxide, semiconductor

中图分类号:

O493

刘力, 郭秀芝, 赵婷婷. 用RF磁控溅射法制备锂氮共掺p型氧化锌[J]. J4, 2010, 07(4): 667-671.

LIU Li, GUO Xiu-Zhi, DIAO Ting-Ting-. p-Type Li-N Dual Doped ZnO Prepared by RF Magnetron Sputtering[J]. J4, 2010, 07(4): 667-671.

[1]	安泰吉, 董招君, 张宇鹏, 王延嘉, 冯威, 蒋惠忠. 用蔗渣遗态转化法制备分级多孔结构氧化锌及其对丙酮气体的检测性能#br#[J]. 吉林大学学报(理学版), 2018, 56(5): 1261-1266.
[2]	张继德, 刘成有, 辛春雨, 于卓, 董振江. 磁控溅射ZnO薄膜的三阶非线性光学特性[J]. 吉林大学学报(理学版), 2017, 55(01): 145-149.
[3]	张凌云, 贾若琨, 孙旭辉, 张瑛洁, 刘春光. Nd掺杂对ZnO带隙及染料敏化太阳能电池光电性能的影响[J]. 吉林大学学报(理学版), 2014, 52(06): 1337-1341.
[4]	郭星原, 丁战辉, 薛燕峰, 徐辑廉, 衣艳磊, 李亮, 周静, 许大鹏. ZnO晶须的变温Raman光谱[J]. J4, 2010, 48(05): 840-842.