MOEMS倾斜下电极光开关的空气压膜阻尼效应
孙东明, 董 玮, 郭文滨, 刘彩霞, 王国东, 徐宝琨, 陈维友
Squeeze Film Damping Effect on Dynamic Response of MOEMS Optical Switch with Slant Lower Electrode
SUN Dong-ming, DONG Wei, GUO Wen-bin, LIU Cai-xia,WANG Guo-dong, XU Bao-kun, CHEN Wei-you
吉林大学学报(理学版)
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2005, (03): 343
-347
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