金刚石膜制备工艺对其应力-应变特性的影响
白亦真,, 吕宪义, 韩雪梅, 金曾孙, 吕天山, 白媛
Influences of Deposition Technologies on Stress-strain Properties of Thick Diamond Films
BAI Yi zhen,, LV Xian yi, HAN Xue mei, JIN Zeng sun, LV Tian shan, BAI Yuan
吉林大学学报(理学版)
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2006, (05): 784
-786
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