Abstract: The diamond-like films deposited by high power excime laser were annealed at different temperatures (200~800 ℃) to study their therm al stability. Raman and XPS spectra were used to characterize the change of the chemical bonding structure of the diamond-like films annealed at different temperatures. The results show that the diamond-like films are composed of fewer sp² C bonds and larger sp³ C bonds fractions. When annea ling temperature was varied in the range of 200~600 ℃, the films have a good thermal stability. But when annealing temperature was increased continually from 6 00 ℃ to 800 ℃, the transformation from sp³ C to sp² C occurred in the films. Thus, higher temperature annealing can lead to the formation of larger fractions of sp² C in the films, the content of sp ³ C drops from about 70% to 40% as annealing temperature is increased from 200 ℃ to 800 ℃.

Key words: excime laser deposition, diamond-like film, thermal stability, anneali ng temperature