Abstract:

The energy deposition of differential regions and particles flow of electrons through the virtualsurface in material were calculated with Monte-Carlo method. Based on the simulated results of the calculated model of singlelayer, the extent of deviation of the results of the calculated model of virtualmultilayer was got. The calculated results demonstrate that the lower electron energy, the thinner singlelayer and the more virtuallayer, the extent of deviation of the virtualmultilayer calculated results is greater.

Key words: MonteCarlo method, calculated model of virtualmultilayer, calculated model of virtual singlelayer, extent of deviation