Abstract:

Vanadium carbide (VC) nano thin films were deposited by magnetron sputtering technology. We investigated the effect of deposition temperature on the microstructure, mechanical and tribological properties of VC thin films, and analyzed their intrinsic relationship. Results show that the increase of deposition temperature has little effect on the phase structure and friction coefficient of VC thin films. However, it is beneficial to reduce the stress and roughness of the film, which can improve the hardness of the film.

Key words: deposition temperature； thin film； tribological property, VC nano thin film