Abstract: By using the method of twobeam interference of nanosecond laser, we fabricated sample of periodic onedimensional grating structure  on the photoresist layer, and studied its shapememory characteristics. The results show that the grating morphology of developed sample is changed under the ambient temperature of 195 ℃ and pressure, as well as the vertical height of grating reduced, and the diffraction intensity weakened. When
 the sample is cooled to room temperature, the grating morphology can remain unchanged. When ambient temperature of the sample is 120 ℃, the morphology of the grating is restored to the original shape, and microshapememory function is realized.

Key words: twobeam interference, micropatterning, shapememory polymer,  microfabrication