Abstract: Co substrates with different thicknesses were deposited on the Si(100) substrates by magnetron sputtering method, then FeCo/SiO2 thin films were prepared by solgel spincoating combined with hydrogen reduction on the Co underlayers. Crystal structure of the samples were tested by Xray diffractometer, while magnetic properties of the thin films were characterized by vibrating sample magnetometer (VSM). The results show that the crystal orientation of FeCo gradually changes from (110) to (200) with the increase of the thickness of Co underlayers. When the thickness of Co underlayer is 10 nm, the value of I₍₂₀₀₎/I₍₁₁₀₎ is the largest, this indicates that the strongest orientation of FeCo(200) is preferred. At the same time, the inplane saturation magnetization of the film is maximum, and the coercivity is minimum, so the thickness of Co increases which is beneficial to improve the soft magnetic properties of FeCo/SiO₂ composite films.

Key words: sol-gel spin-coating, FeCo/SiO₂ composite film, structure, magnetic property, m
agnetron sputtering