Abstract: We used SBA-15 hard template replication technology to prepare In₂O₃ series samples with nanowire array structures at different temperatures. The crystal structure, grain size, unit cell parameters, morphology and band gap width of the samples were characterized by X-ray diffractometer, field scanning electron microscope and UV-Vis spectrophotometer, and the gas sensitivity of the samples to ethanol gas was tested and analyzed. The results show that the samples are all three-dimensional nanowire array structures formed by the orderly arrangement and growth of spherical nano In₂O₃ grains. With the increase of sintering temperature, the grain size and nanowire diameter of the samples increase, and the nanowire spacing decreases. The unit cell parameters and the band gap width of the samples show  an increasing and decreasing trend respectively  with the increase of sintering temperature in the range of sintering temperature from 450 ℃ to 650 ℃. When the mass concentration of ethanol gas is 1×10^-4 mg/L and the test temperature is 320 ℃, the sensitivity of the In₂O₃ sample sintered at 450 ℃ is the maximum of 50.59.

Key words: nanowire array, template replication technology, mesoporous structure, gas-sensing property