吉林大学学报(信息科学版) ›› 2021, Vol. 39 ›› Issue (4): 363-367.

• •    下一篇

基于差动光纤干涉仪的位移测量方法

高丙坤, 丛至诚, 孙 雨   

  1. 东北石油大学 电气信息工程学院, 黑龙江 大庆 163318
  • 收稿日期:2020-12-06 出版日期:2021-07-24 发布日期:2021-07-24
  • 通讯作者: 丛至诚(1997— ), 男, 山东威海人, 东北石油大学硕士研究生, 主要从事 F-P 干涉研究, (Tel)86-15776544803(E-mail)1103541681@ qq. com
  • 作者简介:高丙坤(1962— ), 男, 河北故城人, 东北石油大学教授, 博士生导师, 主要从事超精密测量研究, (Tel)86-15045908000(E-mail)gaobk@ 163. com
  • 基金资助:
    国家自然科学基金资助项目(61422301)

Displacement Measurement Method Based on Differential Optical Fiber Interferometer

GAO Bingkun, CONG Zhicheng, SUN Yu   

  1. School of Electrical Engineering and Information, Northeast Petroleum University, Daqing 163318, China
  • Received:2020-12-06 Online:2021-07-24 Published:2021-07-24

摘要: 为解决装置结构复杂与测量分辨率低的问题, 提出了一种利用单模光纤和耦合器组成的位移测量系统,耦合器输出端两臂连接准直镜头, 照射在被测物体正反两面形成差动结构。 该结构使系统位移分辨率提高了2 倍, 达到 1 / 4 波长, 且整个系统受温度的干扰较小。 通过仿真分析和实验验证, 证明了该方法的可行性,并使用多重希尔伯特变换方法进行位移重构。 结果表明, 该系统的位移重构精度也优于单通道系统, 重构误差由 111 nm 降至 60 nm。

关键词: 光纤传感器; , 法布里-珀罗腔; , 差动; , 位移测量; , 希尔伯特变换

Abstract: A displacement measurement system based on a single mode fiber and a coupler is proposed. The two arms of the output end of the coupler are connected with a collimating lens to form a differential structure when irradiated to both sides of the measured object. The displacement resolution of the system is improved by two times, the resolution can reach a quarter of the wavelength, and the whole system is less disturbed by temperature. Through simulation analysis and experimental verification, the feasibility of this method is proved. Multiple Hilbert transform method is used to carry out displacement reconstruction. The results show that the displacement reconstruction accuracy of this system is also better than that of single-channel system, and the reconstruction error is reduced from 111 nm to 60 nm.

Key words: fiber optic sensor, Fabry-Perot cavity, displacement measurement, differential, hilbert transform

中图分类号: 

  • TN929. 11