防潜在死锁的整体式自动物料搬运系统调度方法

doi:10.13229/j.cnki.jdxbgxb201602038

吉林大学学报(工学版) ›› 2016, Vol. 46 ›› Issue (2): 595-601.doi: 10.13229/j.cnki.jdxbgxb201602038

防潜在死锁的整体式自动物料搬运系统调度方法

周炳海, 周琪

同济大学机械与能源工程学院,上海 201804

收稿日期:2014-07-13 出版日期:2016-02-20 发布日期:2016-02-20
作者简介:周炳海(1965-),男,教授,博士生导师.研究方向:离散系统建模,调度与仿真.E-mail:bhzhou@tongji.edu.cn
基金资助:
国家自然科学基金项目(61273035, 71471135)

Impending deadlock-free scheduling method for unified AMHS in semiconductor FABs

ZHOU Bing-hai, ZHOU Qi

School of Mechanical Engineering, Tongji University, Shanghai 201804, China

Received:2014-07-13 Online:2016-02-20 Published:2016-02-20

摘要/Abstract

摘要： 为有效解决300 mm晶圆制造中整体式自动物料搬运系统OHT路径的潜在死锁问题,提出了基于图论的死锁检测/解除策略.首先对路径的潜在死锁问题进行描述,通过定义链和共享点等概念,建立图论模型,在论证其发生的充要条件后,指出解除潜在死锁的可行方法.然后以任务完成时间最小为优化目标建立数学模型,通过对OHT运行路径上的节点依次进行死锁检测和解除来确定无死锁调度方案.仿真实验表明:该方法能够有效检测和解除OHT运行路径上的潜在死锁,提高晶圆制造系统运行的稳定性和安全性.

关键词: 潜在死锁, 整体式物料搬运系统, 无死锁调度, 路径规划

Abstract: To resolve the impending deadlock problems in the path planning of Overhead Hoist Transporters (OHTs) in unified Automatic Material Handling Systems (AMHSs) of 300 mm wafer fabrication, an impending deadlock-free path planning strategy was proposed on the basis of the graphic theory. First, the impending deadlock problems were formally described. After introducing novel concepts of chains and share points, necessary and sufficient conditions were identified and an available approach was put forward using the graphic model. Then, a mathematic model was set up with an optimal objective function of minimizing the transporting time. Finally, by executing deadlock detection and resolution steps successively, an impending deadlock-free scheduling solution was assigned. Simulation experiments indicate that the proposed strategy can effectively detect and resolve the impending deadlocks occurring in OHTs' path planning during material handling processes. Thus, it can improve the security and stability of wafer fabrication systems.

Key words: impending deadlock, unified AMHSs, deadlock-free scheduling, path planning

中图分类号:

TP29

周炳海, 周琪. 防潜在死锁的整体式自动物料搬运系统调度方法[J]. 吉林大学学报(工学版), 2016, 46(2): 595-601.

ZHOU Bing-hai, ZHOU Qi. Impending deadlock-free scheduling method for unified AMHS in semiconductor FABs[J]. 吉林大学学报(工学版), 2016, 46(2): 595-601.

参考文献

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防潜在死锁的整体式自动物料搬运系统调度方法

Impending deadlock-free scheduling method for unified AMHS in semiconductor FABs

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