吉林大学学报(工学版) ›› 2003, Vol. ›› Issue (4): 126-130.

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Application of SPM in ultraprecision machining

GAO Lun1, WANG Dan2, WANG Li-jiang1   

  1. 1. College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China;
    2. College of Biology and Agriculture Engineering, Jilin University, Changchun 130025, China
  • Received:2002-11-25

Abstract: A review and description are made of bascic principles,imaging pattern of a scanning probe microscope and its application in ultraprecision machining. This paper gives an overview of SPM application in microfabrication and photofabrication,and indicates that the research of nanometer sized machining mechanism will rely on SPM composition and multi functions. None but the integration of processing and measurement is realized,machining method and optional selection of technological parameter are right evaluated,advancing the development in ultraprecision machining.

Key words: SPM, STM, AFM, ultraprecision machining, nanofabrication

CLC Number: 

  • TH742
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