四轴抛光平台综合误差建模及分析

doi:10.13229/j.cnki.jdxbgxb201406022

Abstract

Abstract: The volumetric error of a four-axis polishing platform with two aerostatic stages driven by linear motors and two rotational stages is modeled considering both position error and direction error by multi-body system theory. The individual geometric errors of the motion parts are measured by laser interferometer. The measuring results indicate that, for aerostatic stage, the position error shows neither linear increasing nor decreasing trend; the vertical straightness is larger than the position error and the vertical st4aightness, which is obviously different from the errors of traditional ball screw driven platform. The position component and direction component of the volumetric error of the resultant motion of two linear axes are investigated theoretically and experimentally considering the comprehensive influence of the individual geometric errors of the aerostatic stages. It is found that the vertical component of the volumetric error of the aerostatic stage is obvious. The causes of the geometric errors of the aerostatic stages are revealed, which provides the theoretical basis for geometric error compensation of the polishing platform.

Key words: machine tool technology, aerostatic stage, volumetric error, geometric error, multi-body system

CLC Number:

TH161

ZHAO Guo-juan, ZHANG Lei, LU Lei, HAN Fei-fei, ZHAO Ji. Modeling and analysis of the volumetric errors of four-axis polishing platform[J].吉林大学学报(工学版), 2014, 44(6): 1676-1683.

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