Cu薄膜生长初期的计算机模拟

J4 ›› 2013, Vol. 51 ›› Issue (02): 301-304.

Cu薄膜生长初期的计算机模拟

刘楠, 赵长春, 孙瑶, 王新, 李野, 端木庆铎

长春理工大学理学院, 长春 130022

收稿日期:2012-03-26 出版日期:2013-03-26 发布日期:2013-03-27
通讯作者: 王新 E-mail:wangxin971241@yahoo.com.cn

Computer Simulation of the Early Growth of Cu Films

LIU Nan, ZHAO Chang chun, SUN Yao, WANG Xin, LI Ye, DUANMU Qing duo

School of Science, Changchun University of Science and Technology, Changchun 130022, China

Received:2012-03-26 Online:2013-03-26 Published:2013-03-27
Contact: WANG Xin E-mail:wangxin971241@yahoo.com.cn

摘要/Abstract

摘要：

基于Monte Carlo模型, 在理想基底上设置100×100的二维方形格, 利用周期性边界条件建立Cu薄膜初期生长模型, 并模拟粒子的气相沉积过程及迁移步数对薄膜生长的影响规律. 结果表明: 当沉积粒子数逐渐增加时, 基底表面的粒子团簇结构逐渐增大; 在温度不变的条件下, 随着最大迁移步数的增加, 团簇逐渐增大, 团簇数量逐渐减小, 且团簇分布逐渐稀疏; 温度升高使粒子聚集为岛状, 薄膜呈岛状生长.

关键词: onte Carlo模型, Cu薄膜, 计算机模拟

Abstract:

Two-dimensional computer graphic simulation on the initial growth of Cu thin film was made based on Monte Carlo model. In this model, 100×100 two\|dimensional square lattice was established as the ideal substrate and the periodic boundary conditions were used. From the simulation results, it was found that with the increase of the number of the deposited particles, the particle-cluster deposited on the substrate increased. It was also found that with the increase of the migration step, the size and number of the cluster increased and the distribution became sparse when the temperature kept stable. In addition, the particles deposited assemble to the island with the increase of the temperature, the film was growing up into island.

Key words: Monte Carlo model, Cu film, computer simulation

中图分类号:

O484

刘楠, 赵长春, 孙瑶, 王新, 李野, 端木庆铎. Cu薄膜生长初期的计算机模拟[J]. J4, 2013, 51(02): 301-304.

LIU Nan, DIAO Chang-Chun, SUN Yao, WANG Xin, LI Shu, DUAN Mu-Qiang-Duo-. Computer Simulation of the Early Growth of Cu Films[J]. J4, 2013, 51(02): 301-304.

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