关键词: 扫描电镜, 背散射电子, 二次电子, 探测器, 高分辨

Abstract: Taking  JSM-7900F type field emission scanning electron microscope as an example, the application of secondary electron and backscattered electron in the morphology characterization was discussed, three kinds of probes equipped with this instrument were used to observe the morphology of nano-scale samples by optimizing experimental conditions, and the influencing factors of various experimental conditions were analyzed and discussed. The results show that the backscattered detector combined with electron beam deceleration mode can be used to image several nanometers of particle on the glass surface, the signal-to-noise ratio of image is high, and the imaging effect is better than that of the high-resolution mode, that is, the upper electron probe, which expands the application of backscattered electron in high-resolution imaging.

Key words: scanning electron microscope, backscattered electron, secondary electron, detector, high-resolution