溶胶-凝胶法ZnO薄膜的制备及性能表征

J4 ›› 2012, Vol. 50 ›› Issue (01): 122-125.

溶胶-凝胶法ZnO薄膜的制备及性能表征

辛春雨¹, |张继德¹, |刘成有², |蒋大勇³, |秦杰明^3

1. 白城师范学院物理系, 吉林白城 137000|2. 通化师范学院物理系, 吉林通化 134001|3. 长春理工大学材料科学与工程学院, 长春 130022

收稿日期:2011-01-26 出版日期:2012-01-26 发布日期:2012-03-06
通讯作者: 辛春雨 E-mail:xinchunyu001@tom.com

Preparation and Performance Characterization |of Zinc Oxide Thin Films by Means of Sol Gel Method

XIN Chun yu¹, |ZHANG Ji de¹, |LIU Cheng you², |JIANG Da yong³, |QIN Jie ming^3

1. Department of Physics, Baicheng Normal University, Baicheng 137000, Jilin Province, China|2. Department of Physics, Tonghua Normal University, Tonghua 134001, Jilin Province, China|3. School of Materials Science and Engineering, Changchun University of Science and Technology, Changchun 130022, China

Received:2011-01-26 Online:2012-01-26 Published:2012-03-06
Contact: XIN Chun yu E-mail:xinchunyu001@tom.com

摘要/Abstract

摘要：

采用溶胶-凝胶法在玻璃衬底上制备ZnO薄膜, X射线衍射(XRD)结果表明: 晶粒尺寸随退火温度的升高而增大, 与原子力显微镜(AFM)分析薄膜表面形貌的结果相符; UV\|Vis吸收谱线表明, 在ZnO带边吸收的位置出现较强的吸收, 并得到600 ℃退火处理的薄膜禁带宽度为3.23 eV; 室温光致发光谱表明, 所有薄膜均在386.5 nm处出现一个紫外发射峰, 当退火温度升高时, 深能级发射受到抑制.

关键词: 溶胶-凝胶法, ZnO薄膜, 光学性能

Abstract:

Zinc oxide thin films were synthesized on glass substrates by means of sol\|gel method.The X\|ray diffraction (XRD) results show that the grain size increased with the increasing of annealing temperature, which was confirmed by the morphology by atomic force microscopy (AFM). The UV\|Vis results show that there is a stronger absorption on the near band edge of zinc oxide and the bandgap of the film at 600 ℃ by means of annealing treatment is 3.23 eV. Room\|temperature photoluminescence (PL) results show that all films show UV emission peak at 386.5 nm, the deep level emission is restrained by the increase of annealing temperature.

Key words: sol-gel method, zinc oxide thin film, optical property

中图分类号:

TN814

辛春雨, 张继德, 刘成有, 蒋大勇, 秦杰明. 溶胶-凝胶法ZnO薄膜的制备及性能表征[J]. J4, 2012, 50(01): 122-125.

XIN Chun yu, ZHANG Ji de, LIU Cheng you, JIANG Da yong, QIN Jie ming. Preparation and Performance Characterization |of Zinc Oxide Thin Films by Means of Sol Gel Method[J]. J4, 2012, 50(01): 122-125.

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