Abstract: Physical vapor deposition in horizontal systems has been used for the growth of crystal thin-film of organic semiconductor pentacene. By using 10~30 mg starting material, 20~30 mm² sized crystals thi n-film, sui table for the characterization measurements of the device fabricated, has been g rown. And we have analyzed the thin-film of pentacene crystal by using TEM， X -ray diffraction and scanning electron microscopy.

Key words: physical vapor deposition, crystal thin-film, pentacen