硅基微结构气体传感器结构的有限元模拟分析

Abstract

Abstract: Considering of the thermal resistant and sensitive char acteristics of metal platinum, as well as the heat and electricity insulating ch aracteristics of SiO₂ and SiN_x, we designed a kind of the Si-substrated micro structural gas sensor, which used platinum filament as heate r, gold electrodes with crossing fingers shape as sensitive film electrodes, SiO ₂ and SiN_x as thermal and electricity insulation. Then we simulated and analyzed the static and the transient processes of the heater of t he Si-substrated micro structural gas sensor using the finite element analysis ( FEA) tool ANSYS. The perfect results of the static temperature distributing and the transient response have been obtained.

Key words: MHP(micro-hotplate), FEA(finite element analysis), static, transie nt, temperature distributing, response time

CLC Number:

TP212

YANG Guang-li， ZHANG Tong， LI Chun-ming. FEA Simulation and Analysis of Si-substrated Micro-Structural Gas Sensor[J].J4, 2003, 41(04): 510-512.

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FEA Simulation and Analysis of Si-substrated Micro-Structural Gas Sensor

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