Analysis of Scale Effect of Pullin Voltage of Electrostatically Actuated Microbeam
DING Nan1,2, XU Xu1, ZHENG Zhuoqun1, LIU Xiaobo3
1. College of Mathematics, Jilin University, Changchun 130012, China;2. School of Management Science and Information Engineering, Jilin University of Finance and Economics, Changchun 130117, China; 3. School of Foreign Language Education, Jilin University, Changchun 130012, China
DING Nan, XU Xu, ZHENG Zhuoqun, LIU Xiaobo. Analysis of Scale Effect of Pullin Voltage of Electrostatically Actuated Microbeam[J].Journal of Jilin University Science Edition, 2017, 55(05): 1146-1150.