Abstract: This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto-electro-mechanical systems (MOEMS) optical switch with a slant lower electrode.Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cant ilever beam of the optical switch are derived. According to solving the dynamic equation, the effect of the air squeeze film damping on the switching time is given.

Key words: air squeeze film damping effect, micro-opto-electro-mechanical systems, Reynolds equation, slant lower electrode, switching time