J4 ›› 2013, Vol. 51 ›› Issue (02): 301-304.
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LIU Nan, ZHAO Chang chun, SUN Yao, WANG Xin, LI Ye, DUANMU Qing duo
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Abstract:
Two-dimensional computer graphic simulation on the initial growth of Cu thin film was made based on Monte Carlo model. In this model, 100×100 two\|dimensional square lattice was established as the ideal substrate and the periodic boundary conditions were used. From the simulation results, it was found that with the increase of the number of the deposited particles, the particle-cluster deposited on the substrate increased. It was also found that with the increase of the migration step, the size and number of the cluster increased and the distribution became sparse when the temperature kept stable. In addition, the particles deposited assemble to the island with the increase of the temperature, the film was growing up into island.
Key words: Monte Carlo model, Cu film, computer simulation
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LIU Nan, DIAO Chang-Chun, SUN Yao, WANG Xin, LI Shu, DUAN Mu-Qiang-Duo-. Computer Simulation of the Early Growth of Cu Films[J].J4, 2013, 51(02): 301-304.
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http://xuebao.jlu.edu.cn/lxb/EN/Y2013/V51/I02/301
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