关键词: 微机电系统, 微细电火花铣削加工, 微细电火花线切割加工

Abstract:

Micro Electrical Discharge Machining (microEDM) process and micro Wire Electrical Discharge Machining (microWEDM) process have been proven to be appropriate techniques for fabrication of threedimensional micro parts and high aspect ratio micro structures. The structural feature of microgear shaft and the machining characteristics of microEDM and microWEDM were analyzed in this paper. Then a process flow for fabrication of microgear shaft was proposed, which combines microEDM and microWEDM, and the machining accuracy and efficiency were analyzed. A microgear shaft with pith diameter of 350 μm was fabricated by this method.

Key words: MEMS, MicroEDM milling, MicroWEDM