Al靶中稀土Y含量对薄膜CrAlTiN的影响

吉林大学学报(工学版)

Al靶中稀土Y含量对薄膜CrAlTiN的影响

刘兆政1，刘耀辉1，蒋百灵2，于思荣1

1.吉林大学材料科学与工程学院，长春 130022；2.西安理工大学材料科学与工程学院，西安 710048

收稿日期:2006-12-24 修回日期:2007-05-10 出版日期:2008-07-01 发布日期:2008-07-01
通讯作者: 刘耀辉

Effect of rare earth element Y content in Al target on CrAlTiN film

LIU Zhao-zheng1，LIU Yao-hui1，JIANG Bai-ling2，YU Si-rong1

1.College of Materials Science and Engineering, Jilin University, Changchun 130022, China; 2.College of Materials Science and Engineering, Xi'an University of Technology, Xi'an 710048, China

Received:2006-12-24 Revised:2007-05-10 Online:2008-07-01 Published:2008-07-01
Contact: LIU Yao-hui

摘要/Abstract

摘要： 研究了Al靶中加入不同含量的稀土Y对CrAlTiN薄膜的影响。应用SEM、EDS、XPS、显微硬度计对薄膜样品进行分析。结果表明，在Al靶材中加入稀土Y后，不但提高了薄膜的厚度，而且随着稀土Y含量的增加，薄膜的表面相逐渐由CrN、Cr2N向Cr变化，Al的含量也是随着Y含量的增加而增加。CrAlTiN薄膜的硬度随着稀土Y含量的升高而降低，并且随着Y含量的升高而逐渐趋于1500 HV。

关键词: 材料的表面和界面, 磁控溅射, 稀土Y, SEM, XPS

Abstract: The effect of the content of the rare earth element Y in the aluminium target on the CrAlTiN film was studied. The samples of CrAlTiN film were analyzed by means of the scanning electron microscope, energy dispersive spectrdmeter, Xray photoelectron spectroscope, and micro-hardness meter. The results indicate that adding the rare earth element Y into the aluminium target material could not only raise the film thickness, but also change the surface phases, following the increase of the Y content, the film surface phase changes from CrN,Cr2N to Cr, and the Al content also increases. The hardness of the CrAlTiN film reduces with the increase of the Y content, approaching 1500 HV.

Key words: surface and interface of material, magnetron sputtering, rare earth element Y, scanning electron microscope(SEM), Xray photoelectron spectroscope(XPS)

中图分类号:

TG174.44

刘兆政，刘耀辉，蒋百灵，于思荣 . Al靶中稀土Y含量对薄膜CrAlTiN的影响[J]. 吉林大学学报(工学版), 2008, 38(04): 840-843.

LIU Zhao-zheng1，LIU Yao-hui1，JIANG Bai-ling2，YU Si-rong1 . Effect of rare earth element Y content in Al target on CrAlTiN film[J]. 吉林大学学报(工学版), 2008, 38(04): 840-843.

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