双轴倾角传感器温度补偿方法

doi:10.13229/j.cnki.jdxbgxb.20220390

Abstract

Abstract:

The inclination sensors based on MEMS accelerometers has been widely used. However， it is well known that a large temperature drift exists in MEMS accelerometers. In this paper， the temperature compensation method based on the normalization of diagonal elements of the transformation matrix was proposed. Both the transformation matrix accounting for the sensitivity， non-orthogonality and misalignment and the other matrix accounting for the bias were obtained with the conventional six-position method. The problem that the matrix related to the sensitivity inconsistence can't be separated from the matrix related to the non-orthogonality was overcome through the normalization of the diagonal elements of transformation matrices obtained under the different temperatures relative to the corresponding elements in the transformation matrices obtained under the room temperature. As a result， the temperature drift of the sensitivity and bias of MEMS accelerometers was compensated. Under the testing temperature of -20 ℃~50 ℃， the precision of the inclination sensor was obviously improved after compensation.

Key words: inclination sensor, tri-Axial MEMS accelerometers, temperature compensation model, normalization of the diagonal elements of transformation matrices

CLC Number:

TP212.9

Xin-hua LIN,Zi-dong ZHOU,Shu-fang SHAO,Wei LIN,Rui ZHANG. Temperature compensation method of biaxial inclination sensor[J].Journal of Jilin University(Engineering and Technology Edition), 2024, 54(2): 558-563.

Figures/Tables 6

Fig.1

Fig.2

Table 1

Room temperature error model coefficient"

系数	参数	系数	参数
$B 10$	4.59E-03	$A 12$	6.00E-05
$B 20$	2.32E-03	$A 22$	2.98E-03
$B 30$	3.51E-02	$A 32$	1.80E-05
$A 11$	2.91E-03	$A 13$	3.00E-06
$A 21$	3.00E-05	$A 23$	8.00E-06
$A 31$	9.00E-06	$A 33$	2.89E-03

Table 1

Table 2

Fitting results of thermal compensation parameters"

坐标轴	$C i 1$	$C i 0$	$B i 1$	$B i 0$
$X$	1.06E-04	1.003	1.85E-04	9.24E-03
$Y$	3.01E-04	9.92E-01	1.05E-04	3.59E-04
$Z$	1.18E-05	1.00	3.51E-04	4.50E-02

Table 2

Fig.3

Table 3

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姿态角	补偿前最大误差/（°）	补偿后最大误差/（°）	补偿前标准差/（°）	补偿后标准差/（°）
俯仰30o	0.37	0.19	0.18	0.07
俯仰60o	0.96	0.21	0.37	0.07
横滚30o	0.70	0.32	0.29	0.13
横滚60o	1.00	0.41	0.44	0.16

Temperature compensation method of biaxial inclination sensor

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