MOEMS倾斜下电极光开关的空气压膜阻尼效应

MOEMS倾斜下电极光开关的空气压膜阻尼效应

孙东明, 董玮, 郭文滨, 刘彩霞, 王国东, 徐宝琨, 陈维友

吉林大学集成光电子学国家重点实验室, 长春 130012

收稿日期:2004-07-16 修回日期:1900-01-01 出版日期:2005-05-26 发布日期:2005-05-26
通讯作者: 孙东明

Squeeze Film Damping Effect on Dynamic Response of MOEMS Optical Switch with Slant Lower Electrode

SUN Dong-ming, DONG Wei, GUO Wen-bin, LIU Cai-xia,WANG Guo-dong, XU Bao-kun, CHEN Wei-you

State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012, China

Received:2004-07-16 Revised:1900-01-01 Online:2005-05-26 Published:2005-05-26
Contact: SUN Dong-ming

摘要/Abstract

摘要： 从基于微机械光电系统(MOEMS)的倾斜下电极扭臂式光开关出发, 求解雷诺方程, 得到空气压膜阻尼系数和阻尼力矩的分析公式. 通过求解动力学方程, 给出空气压膜阻尼效应对于光开关响应时间的影响.

关键词: 空气压膜阻尼效应, 微机械光电系统, 雷诺方程, 倾斜下电极

Abstract: This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto-electro-mechanical systems (MOEMS) optical switch with a slant lower electrode.Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cant ilever beam of the optical switch are derived. According to solving the dynamic equation, the effect of the air squeeze film damping on the switching time is given.

Key words: air squeeze film damping effect, micro-opto-electro-mechanical systems, Reynolds equation, slant lower electrode, switching time

中图分类号:

TN256

孙东明, 董玮, 郭文滨, 刘彩霞, 王国东, 徐宝琨, 陈维友. MOEMS倾斜下电极光开关的空气压膜阻尼效应[J]. J4, 2005, 43(03): 343-347.

SUN Dong-ming, DONG Wei, GUO Wen-bin, LIU Cai-xia,WANG Guo-dong, XU Bao-kun, CHEN Wei-you. Squeeze Film Damping Effect on Dynamic Response of MOEMS Optical Switch with Slant Lower Electrode[J]. J4, 2005, 43(03): 343-347.

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